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Alain C. Diebold (Editor)
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دانلود کتاب Handbook of Silicon Semiconductor Metrology
by Alain C. Diebold (Editor)|
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عنوان فارسی: کتاب از سیلیکن نیمه هادی علم اوزان ومقادیر |
دانلود کتاب
جزییات کتاب
Containing more than 300 equations and nearly 500 drawings, photographs, and micrographs,this reference surveys key areas such as optical measurements and in-line calibration methods. It describes cleanroom-based measurement technology used during the manufacture of silicon integrated circuits and covers model-based, critical dimension, overlay, acoustic film thickness, dopant dose, junction depth, and electrical measurements; particle and defect detection; and flatness following chemical mechanical polishing. Providing examples of well-developed metrology capability, the book focuses on metrology for lithography, transistor, capacitor, and on-chip interconnect process technologies.
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