دانلود کتاب Handbook of Thin Film Deposition - Techniques, Processes, and Technologies

This book is a comprehensive reference focusing on thin film technologies and applications used in the semiconductor industry and the closely related areas of thin film deposition, thin film micro properties, photovoltaic solar energy applications, new materials for memory applications and methods for thin film optical processes. In a major restructuring, this edition of the handbook lays the foundations with an up-to-date treatment of lithography, contamination and yield management, and reliability of thin films. The established physical and chemical deposition processes and technologies are then covered, the last section of the book being devoted to more recent technological developments such as microelectromechanical systems, photovoltaic applications, digital cameras, CCD arrays, and optical thin films. Content: Front Matter • Preface • Table of Contents •Part I. Scaling Introduction to Chapter 1 1. A Perspective on Today's Scaling Challenges and Possible Future Directions 2. Scaling and its Implications for the Integration and Design of Thin Film and Processes 3. Scaling - Its Effects on Heat Generation and Cooling of Devices. A "Thermal Moore's'' Law? •Part II. Thin Film Deposition, Equipment and Processing 4. Sputter Processing 5. Thin-Film Strain Engineering and Pattern Effects in Dielectrics CVD 6. Equipment and Manufacturability Issues in CVD Processes 7. CMP Method and Practice 8. Process Technology for Copper Interconnects •Part III. New Applications 9. Optical Thin Films 10. Thin Films in Photovoltaics 11. Application of Thin Films in Semiconductor Memories Index