دانلود کتاب Design and Manufacturing of Active Microsystems

Name: Design and Manufacturing of Active Microsystems
Availability: InStock
Author: Stephanus Büttgenbach
ISBN: 9783642129032,364212903X

by Stephanus Büttgenbach, Arne Burisch, Jürgen Hesselbach

عنوان فارسی: طراحی و ساخت میکروسیستم های فعال
ناشر: Springer Science & Business Media
سال: 2011
زبان: انگلیسی
تعداد صفحه (نسخه چاپی - نسخه الکترونیکی): 444-447
شابک: 9783642129032,364212903X
نوع فایل: PDF دانلود نرم افزار مطالعه
حجم: 56.73 مگابایت

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جزییات کتاب

This book presents the design and manufacturing of microsystems as well as necessary key technologies developed within the Collaborative Research Center 516. The research efforts of this collaboration are focused on active micro systems which are based on the electromagnetic actuator principle. The travel of the investigated actuator systems is on the order of several millimeters. The total construction size of the actuator is on the range of several centimeters whereas essential structures being several micrometers. The methods and the production technologies that are investigated on the basis of various research models incorporate the fundamental process chains of microsystems.