دانلود کتاب Enabling Technology for MEMS and Nanodevices

Microstructures, electronics, nanotechnology - these vast fields of research are growing together as the size gap narrows and many different materials are combined. Current research, engineering sucesses and newly commercialized products hint at the immense innovative potentials and future applications that open up once mankind controls shape and function from the atomic level right up to the visible world without any gaps. Sensor systems, microreactors, nanostructures, nanomachines, functional surfaces, integrated optics, displays, communications technology, biochips, human/machine interfaces, prosthetics, miniaturized medical and surgery equipment and many more opportunities are being explored. This new series, Advanced Micro & Nanosystems, provides cutting-edge reviews from top authors on technologies, devices and advanced systems from the micro and nano worlds.Content: Chapter 1 M3: the Third Dimension of Silicon (pages 1–19): P. M. SarroChapter 2 Trends in MEMS Commercialization (pages 21–47): J. W. Knutti and H. V. AllenChapter 3 Capacitive Interfaces for MEMS (pages 49–92): V. P. Petkov and B. E. BoserChapter 4 Packaging of Advanced Micro? and Nanosystems (pages 93–164): V. M. Bright, C. R. Stoldt, D. J. Monk, M. Chapman and A. SalianChapter 5 High?frequency Integrated Microelectromechanical Resonators and Filters (pages 165–192): F. AyaziChapter 6 MEMS in Mass Storage Systems (pages 193–236): T. R. Albrecht, M. Despont, E. Eleftheriou, J. U. Bu and T. HiranoChapter 7 Scanning Micro? and Nanoprobes for Electrochemical Imaging (pages 237–287): C. Kranz, A. Kueng and B. MizaikoffChapter 8 Nanofluidic Modeling and Simulation (pages 289–317): M. Geier, A. Greiner, D. Kauzlaric and J. G. KorvinkChapter 9 Nanofluidics – Structures and Devices (pages 319–355): J. Lichtenberg and H. BaltesChapter 10 Carbon Nanotubes and Sensors: a Review (pages 357–382): J. R. Stetter and G. J. MaclayChapter 11 CMOS?based DNA Sensor Arrays (pages 383–414): R. Thewes, F. Hofmann, A. Frey, M. Schienle, C. Paulus, P. Schindler?Bauer, B. Holzapfl and R. Brederlow