دانلود کتاب LIGA and Its Applications

Covering technological aspects as well as the suitability and applicability of various kinds of uses, this handbook shows optimization strategies, techniques and assembly pathways to achieve the combination of complex, even three-dimensional structures with simple manufacturing steps. The authors provide information on markets, commercialization opportunities and aspects of mass or large-scale production as well as design tools, experimental techniques, novel materials, and ideas for future improvements. Not only do they weigh up cost versus quantity, they also consider CMOS and LIGA strategies. Of interest to physicists, electronics engineers, materials scientists, institutional and industrial libraries as well as graduate students of the relevant disciplines.Content: Chapter 1 Introduction: LIGA and Its Applications (pages 1–10): Prof. Dr. Volker SaileChapter 2 X?Ray Masks for LIGA Microfabrication (pages 11–50): Yohannes Desta and Jost GoettertChapter 3 Innovative Exposure Techniques for 3D Microfabrication (pages 51–68): Naoki Matsuzuka and Prof. Dr. Osamu TabataChapter 4 Hot Embossing of LIGA Microstructures (pages 69–102): Mathias Heckele and Matthias WorgullChapter 5 Exposure and Development Simulation for Deep X?Ray LIGA (pages 103–142): Prof. Dr. Jan G. Korvink, Sadik Hafizovic, Yoshikazu Hirai and Pascal MeyerChapter 6 Design for LIGA and Safe Manufacturing (pages 143–188): Ulrich Gengenbach, Ingo Sieber and Prof. Dr. Ulrike WallrabeChapter 7 Commercialization of LIGA (pages 189–203): Ron A. LawesChapter 8 Polymer Optics and Optical MEMS (pages 205–232): Jurgen MohrChapter 9 Refractive X?Ray Lenses Produced by X?Ray Lithography (pages 233–242): Arndt LastChapter 10 RF Applications (pages 243–280): Sven Achenbach and David M. KlymyshynChapter 11 Evolution of the Microspectrometer (pages 281–296): Reiner Wechsung, Sven Schonfelder and Andreas DeckerChapter 12 Actuator Manufacture with LIGA Processes (pages 297–321): Todd ChristensonChapter 13 Development of Microfluidic Devices Created via the LIGA Process (pages 323–335): Masaya KurokawaChapter 14 Application of Inspection Devices (pages 337–349): Yoshihiro HirataChapter 15 The Micro Harmonic Drive Gear (pages 351–394): Reinhard Degen and Rolf SlatterChapter 16 Microinjection Molding Machines (pages 395–414): Christian GornikChapter 17 Filled Resist Systems (pages 415–441): Thomas Hanemann, Claas Muller and Michael SchulzChapter 18 Dramatic Downsizing of Soft X?Ray Synchrotron Light Source from Compact to Tabletop (pages 443–452): Hironari Yamada, Norio Toyosugi, Dorian Minkov and Yoshiko OkazakiChapter 19 PTFE Photo?Fabrication by Synchrotron Radiation (pages 453–468): Takanori Katoh and Yanping Zhang