دانلود کتاب Handbook of Thin Film Deposition Processes and Techniques. Principles, Methods, Equipment and Applicatios

Content: Foreword, Pages ix-x, Gordon E. MoorePreface to the Second Edition, Pages xi-xii, Krishna SeshanPreface to the First Edition, Pages xiii-xiv, Klaus K. SchuegrafContributors, Pages xv-xviRecent Changes in the Semiconductor Industry, Pages 1-9, Krishna Seshan1 - Deposition Technologies and Applications: Introduction and Overview, Pages 11-43, Werner Kern, Klaus K. Schuegraf2 - Silicon Epitaxy by Chemical Vapor Deposition, Pages 45-110, Martin L. Hammond3 - Chemical Vapor Deposition of Silicon Dioxide Films, Pages 111-150, John Foggiato4 - Metal Organic Chemical Vapor Deposition: Technology and Equipment, Pages 151-203, John L. Zilko5 - Feature Scale Modeling, Pages 205-240, Vivek Singh6 - The Role Of Metrology And Inspection In Semiconductor Processing, Pages 241-286, Mark Keefer, Rebecca Pinto, Cheri Dennison, James Turlo7 - Contamination Control, Defect Detection, and Yield Enhancement in Gigabit Manufacturing, Pages 287-318, Suresh Bhat, Krishna Seshan8 - Sputtering and Sputter Deposition, Pages 319-348, Stephen Rossnagel9 - Laser and Electron Beam Assisted Processing, Pages 349-379, Cameron A. Moore, Zeng-qi Yu, Lance R. Thompson, George J. Collins10 - Molecular Beam Epitaxy: Equipment and Practice, Pages 381-461, Walter S. Knodle, Robert Chow11 - Ion Beam Deposition, Pages 463-499, John R. McNeil, James J. McNally, Paul D. Reader12 - Chemical Mechanical Polishing, Pages 501-512, Kenneth C. Cadien13 - Organic Dielectrics in Multilevel Metallization of Integrated Circuits, Pages 513-593, Krishna Seshan, Dominic J. Schepis, Laura B. Rothman14 - Performance, Processing, and Lithography Trends, Pages 595-607, Krishna SeshanIndex, Pages 609-629